Integrated electrostatic discharge (esd) device

ABSTRACT

A method for making a semiconductor device includes providing a substrate of a first conductivity type and having a surface region, forming a well region of a second conductivity type and having a first depth in the substrate, adding a gate dielectric layer overlying the surface region, adding a gate layer overlying the gate dielectric layer, forming a first LDD region of the first conductivity type and having a second depth within the well region, forming an emitter region of the second conductivity type within the first LDD region, and forming a second LDD region of the first conductivity type with the well region, a channel region separates the first and second LDD regions. The method further includes forming a source region being of the first conductivity type within the second LDD region and adding an output pad coupled to both the drain and emitter regions.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional application of U.S. patent applicationSer. No. 12/483,195, filed Jun. 11, 2009, entitled “IntegratedElectrostatic Discharge (ESD) Device,” the entire content of which isincorporated herein by reference for all purposes. The U.S. applicationSer. No. 12/483,195 claims the benefit and priority under 35 U.S.C. 119of Chinese Patent Application No. 200810040570.8, filed Jul. 15, 2008,entitled “Integrated Electrostatic Discharged Device,” by inventors ChiKang Liu, Ta Lee Yu, and Quan Li, commonly assigned. Both of theseapplications are commonly owned and incorporated by reference herein forall purposes.

BACKGROUND OF THE INVENTION

The present invention is directed to integrated circuits and theirprocessing for the manufacture of semiconductor devices. Moreparticularly, the invention provides a method and device for an ESDdevice incorporating a high voltage LDD structure for the manufacture ofintegrated circuits. The invention provides techniques for an ESD devicewhich has a lower trigger voltage and offers more effective protectionto the integrated circuit than conventional devices. Merely by way ofexample, the invention has been applied to ESD protection of highvoltage I/O circuit for the manufacture of integrated circuits. But itwould be recognized that the invention has a much broader range ofapplicability.

Integrated circuits or “ICs” have evolved from a handful ofinterconnected devices fabricated on a single chip of silicon tomillions of devices. Current ICs provide performance and complexity farbeyond what was originally imagined. In order to achieve improvements incomplexity and circuit density (i.e., the number of devices capable ofbeing packed onto a given chip area), the size of the smallest devicefeature, also known as the device “geometry”, has become smaller witheach generation of ICs. Semiconductor devices are now being fabricatedwith features less than a quarter of a micron across.

Increasing circuit density has not only improved the complexity andperformance of ICs but has also provided lower cost parts to theconsumer. An IC fabrication facility can cost hundreds of millions, oreven billions, of dollars. Each fabrication facility will have a certainthroughput of wafers, and each wafer will have a certain number of ICson it. Therefore, by making the individual devices of an IC smaller,more devices may be fabricated on each wafer, thus increasing the outputof the fabrication facility. Making devices smaller is very challenging,as each process used in IC fabrication has a limit. That is to say, agiven process typically only works down to a certain feature size, andthen either the process or the device layout needs to be changed. Anexample of such a limit is electrostatic discharge (ESD) protectiondevices used for the manufacture of integrated circuits in a costeffective and efficient way.

Fabrication of custom integrated circuits using chip foundry serviceshas evolved over the years. Fabless chip companies often design thecustom integrated circuits. Such custom integrated circuits require aset of custom masks commonly called “reticles” to be manufactured. Achip foundry company called Semiconductor International ManufacturingCompany (SMIC) of Shanghai, China is an example of a chip company thatperforms foundry services. Although fabless chip companies and foundryservices have increased through the years, many limitations still exist.For example, in a high voltage process, it is difficult to fabricateefficient electrostatic discharge (ESD) bipolar junction transistor(BJT) devices. Because in a high voltage process deep N-type and P-typewells are used. Conventional ESD bipolar devices built in these deepwells can not be easily triggered by high voltage pulses caused by ESDevents. Conventional high voltage ESD devices which include simpleN+/P-well or P+/N-well diodes suffer from large areas and poor ESDperformance.

FIG. 1 is a cross-sectional view diagram of a conventional bipolar ESDclamp device. As shown ESD clamp device 100 includes a bipolartransistor 140 formed with P-type double diffused drain (DDD) 130,high-voltage N-well 120, and P-type substrate 110. To provide deviceprotection, an ESD bipolar transistor needs to trigger at a moderatevoltage, for example 10-15 volts for some applications. Then a largecurrent is allowed to flow through the bipolar transistor at asubstantially reduced voltage, thus avoiding damages to other devices inthe integrated circuit. In the conventional ESD clamp device shown inFIG. 1, the base width of bipolar transistor 140, which is determined bya depth of the HV N-well region 120 in FIG. 1, can be as large as 3 um.Therefore it would take a very high voltage for the bipolar transistorto trigger. As a result ESD protection is only provided by a diodejunction breakdown in bipolar transistor 140. When operation voltage ishigher than the junction breakdown voltage, for example, 30V, the energyof junction break down during the ESD pulse, which can be expressed as aproduct of voltage and current (V*I), can be very large. FIG. 2 is asimplified drawing of a current-voltage curve during a junctionbreakdown of a conventional bipolar ESD clamp device. Large devices aretherefore needed to increase ESD junction area to avoid junctionburnout. These and other limitations are described throughout thepresent specification and more particularly below.

From the above, it is seen that an improved technique for processingsemiconductor devices is desired.

BRIEF SUMMARY OF THE INVENTION

According to an embodiment of the present invention techniques areprovided for integrated circuits and their processing. Moreparticularly, the invention provides a method and device for an ESDdevice incorporating a high voltage LDD structure for the manufacture ofintegrated circuits. The invention provides techniques for an ESD devicewhich has a lower trigger voltage and offers more effective protectionto the integrated circuit than conventional devices. Merely by way ofexample, the invention has been applied to ESD protection of highvoltage I/O circuit for the manufacture of integrated circuits. But itwould be recognized that the invention has a much broader range ofapplicability.

In a specific embodiment, the invention provides semiconductor deviceincluding a semiconductor substrate comprising a surface region and awell region within the semiconductor substrate. The semiconductorsubstrate is characterized by a first conductivity type, and the wellregion is characterized by a second conductivity type. The well regionis also characterized by a first depth. The device includes a firstlightly-doped-drain (LDD) region within the well region. The first LDDregion is of the first conductivity type and is characterized by asecond depth. The device also includes an emitter region within thefirst LDD region. The emitter region is characterized by the secondconductivity type. The device includes a drain region of the firstconductivity type within the first LDD region, and a secondlightly-doped-drain (LDD) region of the first conductivity type withinthe well region. The second LDD region is separated from the first LDDregion by a channel region. The device further includes a source regionof the first conductivity type within the second LDD region. The devicealso includes gate dielectric overlying the surface region, and a gatelayer overlying the gate dielectric layer. The device also includes anoutput terminal coupled to both the drain region and the emitter region.The first LDD region, the well region, and the substrate are associatedwith a first bipolar transistor, which is characterized by a firsttrigger voltage. The emitter region, the first LDD region, and the wellregion are associated with a second bipolar transistor, which ischaracterized by a second trigger voltage. In an embodiment, thesemiconductor substrate is a silicon based semiconductor substrate. Inan embodiment, the first lightly-doped-drain (LDD) region is ahigh-voltage LDD region (HV-LDD). In a specific embodiment, the firstconductivity type is P-type and the second conductivity type is N-type.In another embodiment, the first conductivity type is N-type and thesecond conductivity type is P-type. In an embodiment, the first depthand second depth are selected such that the first trigger voltage andthe second trigger voltage are less than a predetermined voltage. In anembodiment, the first depth is approximately 3 um, whereas the seconddepth is approximately 0.5-1.5 um. In another embodiment, the seconddepth is approximately one half of the first depth. In some embodiment,the first trigger voltage is less than 30 volts, whereas in otherembodiment, the first trigger voltage is approximately 10 volts. In anembodiment, the second trigger voltage is less than 30 volts. In anotherembodiment, the second trigger voltage can be approximately 10 volts. Ina specific embodiment, the second LDD region is characterized by a thirddepth, and the third depth is less than the second depth.

In another embodiment, the invention provides a semiconductor device forESD protection that includes a semiconductor substrate of a firstconductivity type and a well region of a second conductivity type formedwithin the substrate. The well region is characterized by a first depth.An MOS transistor includes a first lightly doped drain (LDD) region of asecond depth within the well region, and a drain region and an emitterregion within in the first LDD region. The emitter region ischaracterized by a second conductivity type. A first bipolar transistoris associated with the emitter region, the first LDD region, and thewell region, and is characterized by a first trigger voltage. A secondbipolar transistor is associated with the first LDD region, the wellregion, and the substrate, and is characterized by a second triggervoltage. The first depth and second depth are selected such that thefirst trigger voltage and the second trigger voltage are less than apredetermined voltage. In an embodiment, the first lightly-doped-drain(LDD) region is a high-voltage LDD region (HV-LDD).

In another embodiment the invention provides a bipolar ESD clampapparatus for the manufacture of integrated circuits. The apparatusincludes a p-type silicon substrate which includes a surface region. Theapparatus also includes an N-well region within the substrate, theN-well region being characterized by a first depth. The apparatusincludes a p-type high-voltage lightly-doped-drain (LDD) within theN-well region, an N+ region within the high voltage LDD region, and a P+region within the high voltage LDD region. The N+ region and the P+region are connected to a pad structure. In an embodiment, the highvoltage LDD region, the N-well region, and the substrate are associatedwith a first bipolar transistor characterized by a first triggervoltage, and the N+ region, the high voltage LDD region, and the N-wellregion are associated with a second bipolar transistor characterized bya second trigger voltage. In an embodiment, the first depth and seconddepth are selected such that the first trigger voltage and the secondtrigger voltage are less than a predetermined voltage. In a specificembodiment, the first trigger voltage is less than about 30 volts andthe second trigger voltage is less than about 30 volts. In anotherembodiment, the first trigger voltage is approximately 10 volts and thesecond trigger voltage is approximately 10 volts. In an embodiment, thehigh voltage LDD region is characterized by a first depth that isapproximately one half of a depth of the N-well region.

In an alternative embodiment, a method is provided for making asemiconductor device. The method includes providing a semiconductorsubstrate comprising a surface region. The semiconductor substrate ischaracterized by a first conductivity type. The method includes forminga well region of a second conductivity type within the semiconductorsubstrate. The well region is also characterized by a first depth. Themethod also includes adding a gate dielectric layer overlying thesurface region, and adding a gate layer overlying the gate dielectriclayer. The method further includes forming a first lightly-doped-drain(LDD) region within the well region, the first LDD region being of thefirst conductivity type and characterized by a second depth. The methodincludes forming an emitter region of the second conductivity typewithin the first LDD region. The method also forms a drain region of thefirst conductivity type within the first LDD region. The method alsoforms a second lightly-doped-drain (LDD) region of the firstconductivity type within the well region. The second LDD region isseparated from the first LDD region by a channel region. The methodincludes forming a source region of the first conductivity type withinthe second LDD region. The method then adds an output pad coupled toboth the drain region and the emitter region. In an embodiment, thefirst LDD region, the well region, and the substrate are associated witha first bipolar transistor characterized by a first trigger voltage. Theemitter region, the first LDD region, and the well region are associatedwith a second bipolar transistor characterized by a second triggervoltage. In an embodiment the first conductivity type is P-type and thesecond conductivity type is N-type. In an embodiment the first depth andsecond depth are selected such that the first trigger voltage and thesecond trigger voltage are less than a predetermined voltage.

Many benefits are achieved by way of the present invention overconventional techniques. For example, the present technique provides aneasy to use process that relies upon conventional technology. In someembodiments, the invention provides a method for achieving low triggervoltage and effective device protection against high voltage ESD events.Additionally, the method provides a process that is compatible withconventional process technology without substantial modifications toconventional equipment and processes.

Depending upon the embodiment, one or more of these benefits may beachieved. These and other benefits will be described in more detailthroughout the present specification and more particularly below.

Various additional objects, features and advantages of the presentinvention can be more fully appreciated with reference to the detaileddescription and accompanying drawings that follow.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view diagram of a conventional bipolar ESDclamp device;

FIG. 2 is a simplified drawing of a current-voltage curve showing ajunction breakdown of a conventional bipolar ESD clamp device;

FIG. 3 is a simplified cross-sectional view diagram of an ESD clampdevice according to an embodiment of the present invention;

FIG. 4 is a simplified drawing of a current-voltage curve showing asnapback of bipolar ESD device according to an embodiment of the presentinvention;

FIG. 5 is a simplified cross-sectional view diagram of an ESD clampdevice according to another embodiment of the present invention;

FIG. 6 is a simplified cross-sectional view diagram of a transistorintegrated with a bipolar ESD clamp device according to an embodiment ofthe present invention;

FIG. 7 is a simplified cross-sectional view diagram of a transistorintegrated with a bipolar ESD clamp device according to an alternativeembodiment of the present invention;

FIG. 8 is a simplified flow chart of a method for making a transistordevice with integrated ESD clamp device according to an embodiment ofthe present invention.

DETAILED DESCRIPTION OF THE INVENTION

According to embodiments of the present invention techniques areprovided for integrated circuits and their processing. Moreparticularly, the invention provides a method and device for an ESDdevice incorporating a high voltage LDD structure for the manufacture ofintegrated circuits. The invention provides techniques for an ESD devicewhich has a lower trigger voltage and offers more effective protectionto the integrated circuit than conventional techniques. Merely by way ofexample, the invention has been applied to ESD protection of highvoltage I/O circuit for the manufacture of integrated circuits. But itwould be recognized that the invention has a much broader range ofapplicability.

Depending upon the embodiment, the present invention includes variousfeatures, which may be used. These features include the following:

1. An ESD protection device having low trigger voltage and offering moreeffective protection of the integrated circuit than conventionaldevices.

2. A method for forming a high voltage I/O transistor having anintegrated ESD protection device.

3. A method for forming high voltage NMOS and PMOS I/O transistorshaving embedded ESD protection devices.

As shown, the above features may be in one or more of the embodiments tofollow. These features are merely examples, which should not undulylimit the scope of the claims herein. One of ordinary skill in the artwould recognize many variations, modifications, and alternatives.

FIG. 3 is a simplified cross-sectional view diagram of an ESD clampdevice 300 according to an embodiment of the present invention. Thisdiagrams is merely an example, which should not unduly limit the scopeof the claims herein. One of ordinary skill in the art would recognizemany variations, alternatives, and modifications. As shown, ESD clampdevice 300 includes P-type substrate 310 having a surface region 315,and an N-type well region 320 formed within the P-type substrate 310. Inan embodiment, N-type well region 320 has a depth of about 2-3 um. ESDclamp device 300 also includes a high voltage PLDD region (HV-PLDD) 330formed within N-well region 320. In an embodiment, HV-PLDD region 330has a depth of, e.g., approximately 0.5-1.5 um and is doped with P-typeimpurities such as boron or boron-containing impurities to aconcentration of e.g., approximately 1E16 to 1E17/cm³. These depth andconcentration values are merely examples, which should not unduly limitthe scope of the claims herein. One of ordinary skill in the art wouldrecognize many variations and modifications according to specificapplications. ESD clamp device 300 further includes N+ region 340 and P+region 350 formed within the HV-PLDD region 330. The N+ regions 340 isheavily doped with N-type impurities such as arsenic or phosphorus to aconcentration of e.g. approximately 1E18 to 1E19/cm³, depending onspecific applications. P+ regions 350 is heavily doped with P-typeimpurities such as boron or boron-containing impurities to aconcentration of e.g. approximately 1E18 to 1E19/cm³, depending onspecific applications. As shown in FIG. 3, ESD clamp device 300 includesa pad region 360 which is schematically shown to be electricallyconnected to N+ region 340 and P+ region 350. A contact in N-well isalso provided to be electrically connected to a ground 370. Dependingupon the embodiment, one of ordinary skill in the art would recognizeother variations, modifications, and alternatives.

Referring to FIG. 3, two bipolar transistor structures are formed in ESDclamp device 300. As shown schematically, PNP bipolar transistor 380includes an emitter (P+ region 350 and HV-PLDD region 330), a base(N-well 380), and a collector (P-sub 310). Compared with theconventional ESD device in FIG. 1, PNP transistor 380 has a shorter basewidth in N-well region 320, because the HV-PLDD region 330 extends theemitter region and shortens the base region. Base width of bipolartransistor can be selected by adjusting a depth of N-well region 320 anda depth of HV-PLDD region 330. PNP transistor 380 can therefore betriggered by a lower voltage of, for example, 10-15 volts, whereas aconventional device may have a trigger voltage higher than 30 volts.Therefore PNP transistor 380 can provide better protection against ESDevents which raise a negative high voltage at PAD 360.

Also shown schematically in FIG. 3 is an NPN bipolar transistor 390which includes an emitter (N+ region 340), a base (HV-PLDD 330), and acollector (N-well 320). NPN bipolar transistor 390 can be triggered at apredetermined trigger voltage and offer protection against ESD eventswhich present a positive high voltage at PAD 360. The base width of NPNbipolar transistor 390 is determined by a depth of the HV_PLDD region.According to embodiments of the invention, the depth of HV-PLDD region330 is chosen to be more than that of conventional P-type LDD region forlogic transistors. As mentioned earlier, the depth of HV-PLDD region 330also affects the base width of PNP transistor 380. The dopingconcentration and depth of the HV-PLDD region are chosen to provideappropriate width and doping concentration of bipolar transistor baseregions, which are design parameters selected to optimize triggervoltages for both PNP transistor 380 and NPN transistor 390. In aspecific embodiment, HV-PLDD region 330 has a depth of approximately0.5-1.5 um and is doped with P-type impurities such as boron orboron-containing impurities to a concentration of approximately 1E16 to1E17/cm³. These design parameters are merely examples, which should notunduly limit the scope of the claims herein. One of ordinary skill inthe art would recognize many variations and modifications according tospecific applications.

FIG. 4 is a simplified drawing of a current-voltage curve showing asnapback of a bipolar ESD device, such as device 300 in FIG. 3,according to an embodiment of the present invention. As shown, when anexternal ESD high voltage reaches a trigger voltage Vtr, for example,10-15 volts, a bipolar transistor in the ESD clamp device 300 istriggered, allowing current to flow at a safe voltage level Von, forexample, 1-2 volts. Depending on the polarity of the ESD voltage, eitherPNP transistor 380 or NPN transistor 390 can be triggered. These designparameters are merely examples, which should not unduly limit the scopeof the claims herein. One of ordinary skill in the art would recognizemany variations and modifications according to specific applications.

FIG. 5 is a simplified cross-sectional view diagram of an ESD clampdevice according to another embodiment of the present invention. FIG. 5shows an ESD clamp device similar to device 300 in FIG. 3, but havingreversed polarities, i.e., with N-type and P-type conductivitiesinterchanged. Specifically, a high voltage NLDD (HV-NLDD) region 530 isused instead of HV-PLDD region 330 in FIG. 3. Various other componentsin FIG. 5 have their counterparts in FIG. 3. For example, NPN transistor580 is triggered by a negative high voltage at PAD 560, and PNPtransistor 590 is triggered by a negative high voltage at PAD 560.According to embodiments of the invention, the doping concentration anddepth of the HV-NLDD region 530 are chosen to provide appropriate widthand doping concentration of the base regions, which are designparameters selected to optimize the trigger voltages for both PNPtransistor 590 and NPN transistor 580. In a specific embodiment, HV-NLDDregion 530 has a depth of approximately 0.5-1.5 um and is doped withP-type impurities such as boron or boron-containing impurities to aconcentration of approximately 1E16 to 1E17/cm³. In a specificembodiment, the P-well region is about 2-3 um thick. These designparameters are merely examples, which should not unduly limit the scopeof the claims herein. One of ordinary skills in the art would recognizemany variations and modifications according to specific applications.

FIG. 6 is a simplified cross-sectional view diagram of a transistordevice 600 integrated with a bipolar ESD clamp device according to anembodiment of the present invention. This diagrams is merely an example,which should not unduly limit the scope of the claims herein. One ofordinary skill in the art would recognize many variations, alternatives,and modifications. As shown, transistor device 600 includes P-typesubstrate 610 having a surface region 615, and an N-type well region 620formed within the P-type substrate 610. In an embodiment, the N-wellregion has a depth of about 3 um. Transistor device 600 also includes ahigh voltage PLDD region (HV-PLDD) 630 formed within N-well region 620.HV-PLDD region 630 has a depth of, for example, approximately 0.5-1.5 umand is doped with P-type impurities such as boron or boron-containingimpurities to a concentration of, for example, approximately 1E16 to1E17/cm³. These depth and concentration values are merely examples,which should not unduly limit the scope of the claims herein. One ofordinary skills in the art would recognize many variations andmodifications according to specific applications. Transistor device 600also includes P-type region 635, which has substantially the same depthand doping concentration as HV-PLDD region 630 according to anembodiment of the invention. In other embodiments, P-type region 635 canhave different depths and doping concentrations, depending upon specificapplications. Transistor device 600 further includes N+ region 640 andP+ region 650 formed within the HV-PLDD region 630, and P+ region 655formed in P− region 635. The N+ regions 640 is heavily doped with N-typeimpurities such as arsenic or phosphorus to a concentration ofapproximately 1E18 to 1E19/cm³, depending on specific applications. P+regions 650 and 655 are heavily doped with P-type impurities such asboron or boron-containing impurities to a concentration of approximately1E18 to 1E19/cm³, depending on specific applications. These designparameters are merely examples, which should not unduly limit the scopeof the claims herein. One of ordinary skill in the art would recognizemany variations and modifications according to specific applications.

Referring to FIG. 6, transistor device 600 includes an ESD clampstructure similar to device 300 in FIG. 3. For example, PNP transistor680 includes an emitter (P+ region 650 and HV-PLDD region 630), a base(N-well 620), and a collector (P-sub 610). NPN bipolar transistor 690includes an emitter (N+ region 640), a base (HV-PLDD 630), and acollector (N-well 620). PAD 660 is electrically connected to the emitterregions of PNP transistor 680 and NPN transistor 690. Together PNPbipolar transistor 680 and NPN bipolar transistor 690 are triggered byhigh voltages caused by ESD events and provide a current path to protectdevices in the integrated circuit. An example of such device is a PMOStransistor 605 included in transistor device 600.

As shown in FIG. 6, transistor device 600 further includes gate oxidelayer 625 overlying a surface region 615 of N-well region 620, apolysilicon gate 665 overlying gate oxide layer 625, and spacer regions667 and 668. As shown, PMOS transistor 605 includes a drain region (P+regions 650), source region (P+ region 655), and a substrate (N-wellregion 620), in addition to gate 665, gate oxide 625, and channel region615. Depending on applications, drain region (P+ regions 650) and sourceregion (P+ region 655) can be interchanged, such that P+ regions 650 isoperated as a source region and P+ region 655 is operated as a drainregion. PMOS transistor 605 also includes spacers 667 and 668, and LDDregions 635 and 630. Transistor 605 can be used as a high voltage I/Odevice, embedded with ESD clamp devices 680 and 690. A high voltage atPAD 660 caused by an ESD event will be diverted by ESD clamp devices 680and 690, thus protecting PMOS transistor 605 from ESD damages. Dependingupon the embodiment, one of ordinary skill in the art would recognizeother variations, modifications, and alternatives.

Referring to FIG. 6, HV-PLDD region 630 extends the emitter region ofPNP transistor 680 and shortens its base region. PNP transistor 680 cantherefore be triggered by a lower voltage such as 10-15 volts, andoffers better protection against ESD events which presents a negativehigh voltage at the pad 660. NPN bipolar transistor 690 has a base widthdetermined by the depth of HV-PLDD region 630. NPN bipolar transistor690 can be triggered by a positive ESD high voltage at the pad 660 andoffers protection against such ESD events. According to embodiments ofthe invention, the doping concentration and depth of the HV-PLDD region630 are chosen to provide appropriate width and doping concentration ofthe base regions of bipolar transistors 680 and 690. These designparameters are selected to optimize the trigger voltages for both PNPtransistor 680 and NPN transistor 690. In a specific embodiment, HV-PLDDregion 630 has a depth of approximately 0.5-1.5 um and is doped withP-type impurities such as boron or boron-containing impurities to aconcentration of approximately 1E16 to 1E17/cm³. These design parametersare merely examples, which should not unduly limit the scope of theclaims herein. One of ordinary skill in the art would recognize manyvariations and modifications according to specific applications.

FIG. 7 is a simplified cross-sectional view diagram of a transistorincorporated with a bipolar ESD clamp device according to an alternativeembodiment of the present invention. In FIG. 7, device 700 includes NMOStransistor 705 with an embedded ESD clamp device, similar to device 600in FIG. 6, but having reversed polarities, i.e., with N-type and P-typeconductivities interchanged. For example, a high voltage NLDD (HV-NLDD)region 730 is used instead of HV-PLDD region 630 in FIG. 6. N-wellregion 710 is formed within P-type substrate 709. Alternatively, N-wellregion can be replaced by an N-type substrate. Various other componentsin FIG. 7 have their counterparts in FIG. 6. For example, NPN transistor780 is triggered by a positive high voltage at PAD 760, and PNPtransistor 790 is triggered by a negative high voltage at PAD 760.According to embodiments of the invention, the doping concentration anddepth of the HV-NLDD region 730 are chosen to provide appropriate widthand doping concentration of the base regions, which are designparameters selected to optimize the trigger voltages for both PNPtransistor 790 and NPN transistor 780. In a specific embodiment, P-wellregion 720 has a depth of approximately 2-3 um. HV-NLDD region 730 has adepth of approximately 0.5-1.5 um and is doped with P-type impuritiessuch as boron or other boron-containing impurities to a concentration ofapproximately 1E16 to 1E17/cm³. These design parameters are merelyexamples, which should not unduly limit the scope of the claims herein.One of ordinary skill in the art would recognize many variations andmodifications according to specific applications.

A method for fabricating an integrated circuit device according to anembodiment of the present invention may be outlined as follows:

1. Provide a substrate, e.g., silicon wafer;

2. Form well regions including at least an N-well region;

3. Form gate oxide region;

4. Form polysilicon layer for transistors;

5. Form lightly doped drain regions;

6. Form spacer region on sides of the polysilicon gates;

7. Form the source and drain of the logic transistors.

8. Form an emitter region for the ESD clamp device;

9. Perform backend processing including interlayer dielectrics, metal,and contacts.

The above sequence of steps provides a method according to an embodimentof the present invention. As shown, the method uses a combination ofsteps including a way of forming a high voltage LDD region for an ESDprotection device according to embodiments of the present invention.Other alternatives can also be provided where steps are added, one ormore steps are removed, or one or more steps are provided in a differentsequence without departing from the scope of the claims herein. Furtherdetails of the present method can be found throughout the presentspecification and more particularly below.

FIG. 8 is a simplified flow chart of a method for making a transistordevice with an integrated ESD clamp device according to an embodiment ofthe present invention. This flowchart is merely an example, which shouldnot unduly limit the scope of the claims herein. Referring to theflowchart in FIG. 8, the method includes step 810 for providing asubstrate (e.g., silicon wafer) comprising a surface region. In step820, the method includes forming adequate well structures within thesubstrate. The well structures include an N-well region for a PMOSdevice. In a specific embodiment, the N-well region has a depth ofapproximately 2-3 um. In other embodiments, the depth can be adjustedfor different applications. Alternatively, a P-well can be formed for anNMOS device. A P-well region includes boron based impurities or thelike, and an N-well region includes N-type dopants such as phosphorus orarsenic based impurities. In step 830, the method includes forming agate dielectric layer (e.g., gate oxide, nitride, silicon oxynitride)overlying the surface region, which extends over the well region asshown. The gate dielectric is often formed using a thermal oxidationprocess to form high quality gate oxide, which is substantially freefrom voids. Proper gate dielectric layer depths are often required fordevices to operate at different voltages. Depending upon the embodiment,there can be other variations, modifications, and alternatives.

Referring to FIG. 8, the method in step 840 includes forming apolysilicon film overlying the gate dielectric layer. The polysiliconfilm is often doped using impurities to provide conductivecharacteristics. The film can be doped using diffusion and/or in-situdoping techniques of phosphorus bearing impurities, e.g., phosphine. ForPMOS devices, boron-containing impurities, such as diborine can be used.The film can be a single layer or multiple layers of differentmaterials, depending upon the embodiment. The polysilicon film is thenpatterned to form gate electrodes for MOS transistors.

In step 850, the method includes forming high voltage lightly dopeddrain (“HV-LDD”) structures for each of the transistors. Photoresistmasks are used to allow implanting N-type impurities into NMOS regionsand implanting P-type impurities into PMOS regions. In preferredembodiments, HV-LDD regions are provided to withstand high operatingvoltages. As a result, they are often deeper than conventional LDDimplants used in logic devices. In a specific embodiment, HV-LDD regionhas a depth of approximately 0.5-1.5 um and is doped with impurities toa concentration of approximately 1E16 to 1E17/cm³. Also in step 850, lowvoltage lightly doped drain (LV-LDD) regions may also be formed with thewell region. The LV-LDD regions are provided to reduce the short-channeleffect. These design parameters are merely examples, which should notunduly limit the scope of the claims herein. In some embodiments, thepolysilicon gates are used as a mask during the HV-LDD implant steps. Inother embodiments, HV-LDD implant can be performed before polysilicongate formation. Here, a photoresist mask can be used to define HV-LDDregions, and then polysilicon gates can be patterned and aligned to theHV-LDD regions.

In some embodiments, the HV-LDD is formed on both sides of the channel,i.e., on both the drain side and the source side. In other embodiments,the HV-LDD is formed on the drain side of the device, and a source sideLDD region can be formed using similar masking and implant steps. Thesource side LDD is similar to conventional LDD region in logic MOS orCMOS device, having shallower junction and may be implanted with a lowerdose and lower energy than the HV-LDD. One of ordinary skill in the artwould recognize many variations and modifications according to specificapplications.

After the HV-LDD implant, a dielectric layer (e.g., oxide) is depositedand etched back to form spacers (step 860). After spacer formation,transistor source/drain (S/D) formation processes are performed (step870). Here photoresist masks are used to allow N-type impurities to beimplanted into NMOS regions and P-type impurities into PMOS regions. TheS/D implant uses a dose of impurities ranging from about 3E15atoms/centimeter² to about 5E15 atoms/centimeter² according to preferredembodiments. According to embodiments of the invention, an emitterregion for an ESD clamp device is then formed in step 880. Here, aphotoresist mask is used to define an emitter region in HV-LDD region,and ion implantation is then performed to dope the emitter region withimpurities of a conductivity type opposite to that of a source or drainregion of the transistor. For example, an N+ emitter region is formed ina PMOS transistor, and a P+ emitter is formed in an NMOS transistor. Asdiscussed earlier, the emitter region will become part of a bipolartransistor ESD clamp device.

In step 890, typical backend processes are performed. Here, the methodincludes forming interlayer dielectrics, conductor layers, and contactstructures. In an embodiment, contacts are provided to pad regions ofthe integrated circuit. Examples of resulting device structures of atransistor having an integrated ESD clamp device are shown in FIGS. 6and 7 and discussed earlier. Of course, one of ordinary skill in the artwould recognize other variations, modifications, and alternatives.

It is also understood that the examples and embodiments described hereinare for illustrative purposes only and that various modifications orchanges in light thereof will be suggested to persons skilled in the artand are to be included within the spirit and purview of this applicationand scope of the appended claims.

1. A method for making a semiconductor device, the method comprising:providing a semiconductor substrate comprising a surface region, thesemiconductor substrate being characterized by a first conductivitytype; forming a well region within the semiconductor substrate, the wellregion being characterized by a second conductivity type, the wellregion being also characterized by a first depth; adding a gatedielectric layer overlying the surface region; adding a gate layeroverlying the gate dielectric layer; forming a first lightly-doped-drain(LDD) region within the well region, the first LDD region being of thefirst conductivity type, the first LDD region being characterized by asecond depth; forming an emitter region within the first LDD region, theemitter region being characterized by the second conductivity type;forming a drain region within the first LDD region, the drain regionbeing characterized by the first conductivity type; forming a secondlightly-doped-drain (LDD) region of the first conductivity type withinthe well region, the second LDD region being separated from the firstLDD region by a channel region; forming a source region within thesecond LDD region, the source region being characterized by the firstconductivity type; and adding an output pad coupled to both the drainregion and the emitter region; wherein the first LDD region, the wellregion, and the substrate are associated with a first bipolartransistor, the first bipolar transistor being characterized by a firsttrigger voltage, and wherein the emitter region, the first LDD region,and the well region are associated with a second bipolar transistor, thesecond bipolar transistor being characterized by a second triggervoltage.
 2. The method of claim 1, wherein the first conductivity typeis P-type and the second conductivity type is N-type.
 3. The method ofclaim 1, wherein the first depth and second depth are selected such thatthe first trigger voltage and the second trigger voltage are less than apredetermined voltage.
 4. The method of claim 1, wherein thepredetermined voltage is less than about 30 volts.
 5. The method ofclaim 1, wherein the predetermined voltage is approximately 10 volts.